The Helical Resonator: A Scheme for Radio Frequency Plasma Generation

نویسندگان

چکیده

The helical resonator is a scheme for the production of high voltage at radio frequency, useful gas breakdown and plasma sustainment, which, through proper design, enables avoiding use matching network. In this work, we consider treatment resonator, including grounded shield, as transmission line with shorted end an open one, latter possibly connected to capacitive load. input applied tap point located near end. After deriving expression velocity factor perturbations propagating along line, in special case shield infinity also characteristic impedance, calculate impedance amplification function wave number. Focusing on resonance condition, which maximizes amplification, then discuss effect position, dissipation optional load, terms performance power supply.

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ژورنال

عنوان ژورنال: Applied sciences

سال: 2021

ISSN: ['2076-3417']

DOI: https://doi.org/10.3390/app11167444